SEMICONDUCTOR FABRICATION APPARATUS HAVING STAGE HEATER WHOSE POWER IS ADJUSTED

摘要

A semiconductor manufacturing apparatus with a power-controlled stage heater is provided to improve quality and reliability of semiconductor devices by using gain controllers connected between a temperature controller and the stage heater for supplying constant power. A power controlling apparatus(301) is connected tp a stage(121). The power controlling apparatus includes a temperature controller(311), a first gain controller(321), and a second gain controller(331). The temperature controller supplies power to a stage heater through the first and second gain controller to control a heating degree of the stage heater. The temperature controller is electrically connected to the first and second gain controllers through signal lines.