| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor capable of solving a problem, wherein the strength against an impact from a direction orthogonal to the axial direction is decreased; a defect of the pressure sensor that has linearly or concentrically arranged cylindrical molded bellows for cost reduction. SOLUTION: This pressure sensor is equipped with an airtight case 2 equipped with the first pressure input port 3a and the second pressure input port 4a, the first cylindrical bellows 10 having an axial hole communicated with the first pressure input port, the second cylindrical bellows 12 having an axial hole communicated with the second pressure input port and arranged linearly with the first bellows, a vibration element bonding pedestal 15 fixed and arranged between each other end of the first and second bellows, and a thin plate-shaped piezoelectric vibration element 20 supported by the vibration element bonding pedestal. In the piezoelectric vibration element, one end is fixed to the second wall surface and the other end is fixed to the vibration element bonding pedestal, and the airtight case inner wall is connected to the vibration element bonding pedestal by a reinforcing elastic member 50. COPYRIGHT: (C)2007,JPO&INPIT
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