发明名称 Split gate type non-volatile memory device and method of manufacturing the same
摘要 A non-volatile memory device (e.g., a split gate type device) and a method of manufacturing the same are disclosed. The memory device includes an active region on a semiconductor substrate, a pair of floating gates above the active region, a charge storage insulation layer between each floating gate and the active region, a pair of wordlines over the active region and partially overlapping the floating gates, respectively, and a gate insulation film between each wordline and the active region. The method may prevent or reduce the incidence of conductive stringers on the active region between the floating gates, to thereby improve reliability of the memory devices and avoid the active region resistance from being increased due to the stringer.
申请公布号 US2007052007(A1) 申请公布日期 2007.03.08
申请号 US20060516098 申请日期 2006.09.05
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 JUNG JIN H.
分类号 H01L29/788 主分类号 H01L29/788
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