| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that as for the conventional guide plate coaxial double-deck constitutional guide holes are required to be prepared in the bottom guide plate, processing is so complicated that the cost of production rises with increasing extra fineness of the guide hole. SOLUTION: In the guide plate for probe, which is guide plates equipped with an upper guide plate and a bottom guide plate, guide holes are deployed in the upper guide plate and the bottom guide plate, the guide hole prepared in the bottom guide plate has a double-deck constitution consisting of a guide hole of a first deck and a guide hole of a second deck and a plurality of guide holes of the second deck are prepared in the bottom plane of the guide hole of the first deck. COPYRIGHT: (C)2007,JPO&INPIT
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