发明名称 PROCESSES FOR FABRICATING ELECTRON EMITTING DEVICE, ELECTRON SOURCE, AND IMAGE DISPLAY DEVICE
摘要 A method for manufacturing an electron emission device, an electron source, and an image display device is provided to reduce a leakage current by removing an electron emitting film material from a hole. A structure having a first conductive layer(2), an insulating layer(3) disposed on the first conductive layer and a second conductive layer(4) disposed on the insulating layer is provided. A first hole penetrates to the first conductive layer through the insulating layer and the second conductive layer. A layer of material for an electron emitting member is deposited on an inner surface of the first hole. A second hole penetrating through the second conductive layer is formed on either of the insulating layer and the second conductive layer. A part of the insulating layer interposed between the juxtaposed first and second holes is etched until the first and second holes are communicated with each other.
申请公布号 KR20070026253(A) 申请公布日期 2007.03.08
申请号 KR20060084471 申请日期 2006.09.04
申请人 CANON KABUSHIKI KAISHA 发明人 TERAMOTO YOJI
分类号 H01J1/30;H01J9/02;H01J9/24 主分类号 H01J1/30
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