| 摘要 |
<P>PROBLEM TO BE SOLVED: To clearly obtain decontamination status on the surface of work W based on the detected result by a condensation sensor. <P>SOLUTION: A glass plate 5 on which surface hydrogen peroxide gas is condensed, and the glass plate 5 of a condensation sensor 1 provided with light emitting device 4 and light receiving device 7 for detecting the condensation of hydrogen peroxide gas on the glass plate 5 are arranged in contactless condition for the interior 50a of an isolator 50. Then it is understood that hydrogen peroxide gas is condensed on the surface of the work W when the condensation sensor 1 detects the condensation of hydrogen peroxide gas. <P>COPYRIGHT: (C)2007,JPO&INPIT |
