| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitor of high quality and its manufacturing method. SOLUTION: A capacitor 10 has a lower electrode 13a formed on an oxide film 12, a dielectric layer 14 formed on the lower electrode 13a, an upper electrode 15a formed to face the lower electrode 13a via the dielectric layer 14, and an upper electrode 15b formed to cover an opening part 62v of the upper electrode 15a and an opening part 61v of the dielectric layer 14 covering the upper electrode 15a. Since the upper electrode 15a is formed on the dielectric layer 14, the dielectric layer 14 can be patterned by using the upper electrode as a mask, impurities can be restrained from diffusing into the dielectric layer 14, and the dielectric layer 14 can be prevented from being exposed to etchant, developer or the like, thus providing the capacitor 10 that has the dielectric layer 14 of high quality. COPYRIGHT: (C)2007,JPO&INPIT
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