发明名称 |
Brittle substrate cutting system and brittle substrate cutting method |
摘要 |
A brittle substrate cutting system according to the present invention includes a scribing apparatus including a scribing line forming means for forming a scribing line on a first surface of a brittle substrate; and a breaking apparatus for breaking the brittle substrate along the scribing line, wherein the breaking apparatus includes a first pressing controlling means for moving a pressing force upon a second surface of the brittle substrate opposing the first surface of the brittle substrate along the scribing line while the first surface of the brittle substrate is held.
|
申请公布号 |
US2007051769(A1) |
申请公布日期 |
2007.03.08 |
申请号 |
US20040554855 |
申请日期 |
2004.04.27 |
申请人 |
MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD. |
发明人 |
OTODA KENJI;INOUE SHUICHI |
分类号 |
B26F3/00;C03B33/027;C03B33/03;C03B33/033;C03B33/09;G02F1/1333 |
主分类号 |
B26F3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|