发明名称 Brittle substrate cutting system and brittle substrate cutting method
摘要 A brittle substrate cutting system according to the present invention includes a scribing apparatus including a scribing line forming means for forming a scribing line on a first surface of a brittle substrate; and a breaking apparatus for breaking the brittle substrate along the scribing line, wherein the breaking apparatus includes a first pressing controlling means for moving a pressing force upon a second surface of the brittle substrate opposing the first surface of the brittle substrate along the scribing line while the first surface of the brittle substrate is held.
申请公布号 US2007051769(A1) 申请公布日期 2007.03.08
申请号 US20040554855 申请日期 2004.04.27
申请人 MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD. 发明人 OTODA KENJI;INOUE SHUICHI
分类号 B26F3/00;C03B33/027;C03B33/03;C03B33/033;C03B33/09;G02F1/1333 主分类号 B26F3/00
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