发明名称 |
Diaphragm changing device |
摘要 |
The invention relates to an optical imaging device, in particular an objective 1 for microlithography in the field of EUVL for producing semiconductor components, having a beam path 2 , a plurality of optical elements 3 and a diaphragm device 7 with an adjustable diaphragm opening shape. The diaphragm device has a diaphragm store 7 a, 7 b with a plurality of different diaphragm openings 6 with fixed shapes in each case, which can be introduced into the beam path 2.
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申请公布号 |
US2007053076(A1) |
申请公布日期 |
2007.03.08 |
申请号 |
US20030595583 |
申请日期 |
2003.12.18 |
申请人 |
BIEG HERMANN;WILL MARCUS;BISCHOFF THOMAS;KWAN YIM-BUN P;NGUYEN UY-LIEM;XALTER STEFAN;MUHLBEYER MICHAEL |
发明人 |
BIEG HERMANN;WILL MARCUS;BISCHOFF THOMAS;KWAN YIM-BUN P.;NGUYEN UY-LIEM;XALTER STEFAN;MUHLBEYER MICHAEL |
分类号 |
G02B9/00;G02B5/00;G02B13/14;G03F7/20 |
主分类号 |
G02B9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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