发明名称 Synthesis of large homoepitaxial monocrystalline diamond
摘要 A method for producing a large homoepitaxial monocrystalline diamond. The method comprises placing at least two substrates in a substrate holder in a chemical vapor deposition (CVD) chamber. The substrates are positioned in such a manner that the growth faces of the substrates form a wedge. A diamond forming gas is provided adjacent to the substrates in the CVD chamber. The diamond forming gas is exposed to microwave radiation to generate a plasma. Then, the substrates are exposed to the plasma under such conditions that diamond growth occurs in the wedge between the substrates, to form a large homoepitaxial monocrystalline diamond.
申请公布号 US2007051300(A1) 申请公布日期 2007.03.08
申请号 US20060515259 申请日期 2006.09.01
申请人 RAJNEESH BHANDARI 发明人 BHANDARI RAJNEESH
分类号 C30B7/00;C30B21/02;C30B28/06 主分类号 C30B7/00
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