APPARATUS FOR FABRICATING SEMICONDUCTOR DEVICE

摘要

Semiconductor device manufacturing equipment is provided to prevent the degradation of a filter due to heat of a boat by installing a filter cover at one side of the filter. Semiconductor device manufacturing equipment includes a loadlock chamber and a filter unit. The loadlock chamber(120) is used for loading a boat. The filter unit(140) is installed at one sidewall of the loadlock chamber. The filter unit is composed of a filter and a filter cover. The filter(142) is used for filtering contaminant materials from purge gas. The filter cover(144) is installed at one side of the filter in order to prevent the filter from being exposed to the heat.