发明名称 METHOD FOR VERIFYING DATA
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a simpler method for verifying writing data. <P>SOLUTION: The method for verifying the writing data 12 for the layout data 10 by comparing the layout data 10 including information about a region where a figure is arranged with the writing data 12 comprises a step (S102) for inputting the writing data 12 and the layout data 10, a step (S112) for comparing the area of a figure in a predetermined region of both the data, a step (S116) for comparing the centroidal position of a figure in a predetermined region of both the data, and a step (S124) for outputting the result of the area comparison step and the result of the centroidal position comparison step. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2007059429(A) 申请公布日期 2007.03.08
申请号 JP20050239444 申请日期 2005.08.22
申请人 NUFLARE TECHNOLOGY INC 发明人 ANPO AKIHITO;HARA SHIGEHIRO;HIGURE HITOSHI;IIJIMA TOMOHIRO;HANDA SUKEHITO
分类号 H01L21/027;G03F1/84 主分类号 H01L21/027
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