| 摘要 |
A substrate transferring apparatus is provided to reduce part counts by removing a power transmitting unit such as a pulley or a belt. A substrate transferring apparatus includes a plurality of shafts(10), a moved member(20), a driven member(30), an actuator(40), and a power transmitting member(50). The plurality of shafts are rotatably installed in a process chamber by a predetermined interval. The moved member is mounted to one side end of the shaft. The driven member is installed on one side of the driving member installed in a main shaft of the shafts. The actuator includes a driving member connected by a force of its own to rotate the driven member. The power transmitting member transmits the rotational movement of the main shaft to the shafts. The moved member has a plurality of positive pole magnets and the same plurality of negative pole magnets.
|
