发明名称 COUPON FOR MEASURING FLATNESS OF SURFACE OF SUBSTRATE AND MEASURING METHOD THEREOF
摘要 A coupon for measuring a surface flatness of a substrate and a measuring method of the same are provided to measure the surface flatness of the substrate by using a nondestructive method. A coupon(10) is formed on a dummy part(5) of a printed circuit board including a circuit pattern in order to measure a surface flatness of the printed circuit board. A first pattern is formed on a center of the printed circuit board. The first pattern has a width wider than a width of the circuit pattern. A second pattern is formed at a predetermined position apart from the first pattern. The second pattern has a width corresponding to the width of the first pattern.
申请公布号 KR100695065(B1) 申请公布日期 2007.03.08
申请号 KR20060027421 申请日期 2006.03.27
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 YOON, KYOUNG RO;SHIN, YOUNG HWAN;LEE, TAE GON;KIM, YOON SU
分类号 H01L21/66 主分类号 H01L21/66
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