| 摘要 |
A gas decomposition apparatus including at least a set of a high-voltage electrode and a ground electrode, an electric power supply for applying a voltage between the high-voltage electrode and the ground electrode to induce a plasma discharge therebetween, a dielectric substance, and a plasma processing unit. The dielectric substance is disposed between the high-voltage electrode and the ground electrode, and is capable of allowing a gas to be decomposed to flow therethrough. The high-voltage electrode, the ground electrode, and the dielectric substance are disposed in the plasma processing unit. At least one of the high-voltage electrode and the ground electrode is composed of an elastic conductive material and is capable of matching a surface profile of the dielectric substance.
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