| 摘要 |
A MEMS resonator, a method for manufacturing thereof, and a filter are provided in which a first-order oscillation mode can be used and an S/N ratio of an output signal can be improved. Further, a communication apparatus of high reliability using the filter is provided. A MEMS resonator of the present invention includes an output electrode, a beam capable of oscillating disposed on an input side to face the output electrode and an input electrode, in which the output electrode and the input electrode 27 are separated from the beam in terms of DC. A filter of the present invention includes the above-described MEMS resonator. A communication apparatus of the present invention includes a filter to limit a band of a transmission signal and/or reception signal, and the above-described filter according to the present invention is used as the filter.
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