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发明名称
X-RAY SOURCE WITH NONPARALLEL GEOMETRY
摘要
申请公布号
IL179112(D0)
申请公布日期
2007.03.08
申请号
IL20060179112
申请日期
2006.11.07
申请人
CABOT MICROELECTRONICS CORPORATION
发明人
分类号
G21K5/02;H01J;H01J35/04;H01J35/06;H01J35/08
主分类号
G21K5/02
代理机构
代理人
主权项
地址
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