发明名称 GAS PURIFYING DEVICE
摘要 <p>Reflow means (L 3 ) is provided in a gas purifying device, and the means causes liquid discharged from an element positioned on the downstream side of an airflow to reflow to a liquid circulation system path of an element positioned on the upstream side of the air flow. The liquid dissolves and removes low-concentration containment by gas-liquid contact, and this causes the liquid to lose the capability of dissolving and removing contaminant. The liquid is discharged from the element on the downstream side and is made to reflow to the element on the upstream side through reflow means, and contaminant is dissolved and removed by gas-liquid contact between the liquid and non-purified air containing high-concentration contaminant.</p>
申请公布号 EP1759755(A1) 申请公布日期 2007.03.07
申请号 EP20050737118 申请日期 2005.04.26
申请人 DAIKIN INDUSTRIES, LTD. 发明人 OHNO, M.;SAHARA, Y.;TETSUYA, K.;MATSUMOTO, T.
分类号 F24F7/00;B01D53/14;B01D53/22;B01D61/02;B01D61/58;F24F3/14;C02F1/32;F24F3/16;F24F7/06;H01L21/027 主分类号 F24F7/00
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