发明名称 |
PROJECTION SYSTEM WITH COMPENSATION OF INTENSITY VARIATONS AND COMPENSATION ELEMENT THEREFOR |
摘要 |
In a projection objective for imaging a pattern arranged in the object plane of the projection objective into the image plane of the projection objective, at least one optical component is provided which has a substrate in which at least one substrate surface is covered with an interference layer system having a great spatial modulation of the reflectance and/or of the transmittance over a usable cross section of the optical component, the modulation being adapted to a spatial transmission distribution of the remaining components of the projection objective in such a way that an intensity distribution of the radiation that is measured in a pupil surface has a substantially reduced spatial modulation in comparison with a projection objective without the interference layer system. |
申请公布号 |
EP1759248(A1) |
申请公布日期 |
2007.03.07 |
申请号 |
EP20050746777 |
申请日期 |
2005.06.03 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
SCHEIBLE, PATRICK;PAZIDIS, ALEXANDRA;GARREIS, REINER;TOTZECK, MICHAEL;GRAEUPNER, PAUL;ROSTALSKI, HANS-JUERGEN;SINGER, WOLFGANG |
分类号 |
G03F7/20;G02B5/28;G02B13/02;G02B17/08;G02B21/33;G02B27/58 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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