发明名称 METHOD FOR PRODUCING A MULTIFUNCTIONAL DIELECTRIC LAYER ON A SUBSTRATE
摘要 <p>A multifunctional dielectric layer can be formed on a substrate, especially on an exposed metallic strip conductor system on a substrate. An additional metal layer is formed across the surface of the exposed metal strip conductors. The metal layer is then at least partially converted to a nonconducting metal oxide, the dielectric layer.</p>
申请公布号 EP1665371(B1) 申请公布日期 2007.03.07
申请号 EP20040762735 申请日期 2004.09.03
申请人 INFINEON TECHNOLOGIES AG 发明人 HELNEDER, JOHANN;SCHWERD, MARKUS;GOEBEL, THOMAS;MITCHELL, ANDREA;KOERNER, HEINRICH;HOMMEL, MARTINA
分类号 H01L21/768;H01L23/532 主分类号 H01L21/768
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