发明名称 |
METHOD FOR PRODUCING A MULTIFUNCTIONAL DIELECTRIC LAYER ON A SUBSTRATE |
摘要 |
<p>A multifunctional dielectric layer can be formed on a substrate, especially on an exposed metallic strip conductor system on a substrate. An additional metal layer is formed across the surface of the exposed metal strip conductors. The metal layer is then at least partially converted to a nonconducting metal oxide, the dielectric layer.</p> |
申请公布号 |
EP1665371(B1) |
申请公布日期 |
2007.03.07 |
申请号 |
EP20040762735 |
申请日期 |
2004.09.03 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
HELNEDER, JOHANN;SCHWERD, MARKUS;GOEBEL, THOMAS;MITCHELL, ANDREA;KOERNER, HEINRICH;HOMMEL, MARTINA |
分类号 |
H01L21/768;H01L23/532 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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