| 摘要 |
<p>A power generation system including a RF power generator which provides a RF output power. The power distribution system includes a phase-magnitude detector module having a dual logarithmic amplifier phase-magnitude detector that receives current and voltage signals. The dual logarithmic amplifier phase-magnitude detector generates a phase signal that varies in accordance with the phase between the voltage signal and the current signal, and a magnitude signal that varies in accordance with the magnitude between the voltage and current signals. A controller receives the phase and magnitude signals, and communicates control signals to the matching network.</p> |
