发明名称 Ferroelectric material, ferroelectric film and method of manufacturing the same, ferroelectric capacitor and method of manufacturing the same, ferroelectric memory, and piezoelectric device
摘要 A ferroelectric material for forming a ferroelectric that is described by a general formula ABO<SUB>3</SUB>, includes an A-site compensation component which compensates for a vacancy of an A site, and a B-site compensation component which compensates for a vacancy of a B site.
申请公布号 US7187025(B2) 申请公布日期 2007.03.06
申请号 US20040807357 申请日期 2004.03.24
申请人 SEIKO EPSON CORPORATION 发明人 HAMADA YASUAKI;KIJIMA TAKESHI;KARASAWA JUNICHI;OHASHI KOJI;NATORI EIJI
分类号 B41J2/045;H01L29/76;B41J2/055;B41J2/16;C01G25/00;C01G33/00;C04B35/49;C09D5/23;G11C11/22;H01B3/12;H01L21/316;H01L21/822;H01L21/8246;H01L21/8247;H01L27/04;H01L27/105;H01L27/115;H01L29/788;H01L29/792;H01L41/09;H01L41/187 主分类号 B41J2/045
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