发明名称 Ultra-precision micro-differential pressure measuring device and ultra-precision differential pressure measuring device
摘要 The ultra-precision micro-differential pressure measuring device comprises a device body 1 having an inner space part therein, a pressure receiving plate 3 which is installed inside the inner space of the device body 1 and divides the said inner space hermetically into a lower space 7 and an upper part space 8, an electronic weighing and pressure converting device 2 which is installed in the lower space 7, and supports and secures the pressure receiving plate 3, and a liquid sealing part R which liquid-seals the outer peripheral part of the aforementioned pressure receiving plate 3 and maintains the air-tightness between the lower space 7 and the upper space 8. A micro-differential pressure between a pressure P 1 inside the upper space 8 and a pressure P 2 inside the lower space 7 is measured by the electronic weighing and pressure converting device 2 through the pressure receiving plate 3.
申请公布号 US7185543(B2) 申请公布日期 2007.03.06
申请号 US20040546159 申请日期 2004.02.12
申请人 FUJIKIN INCORPORATED 发明人 SEKOGUCHI KOTOHIKO
分类号 G01L13/02;G01L13/06;G01L19/06;G01L27/00 主分类号 G01L13/02
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