发明名称 |
Sensor device for determining the layer thickness of a thin layer |
摘要 |
To provide a sensor device for determining the layer thickness of a thin layer of an electrically conducting or semiconducting material which can be used in a simple and low-cost way, it is proposed that the said sensor device comprises one or more inductive proximity sensors which can be positioned at a distance from the layer, an inductive proximity sensor having an oscillator with a frequency which is adapted with respect to the material and the thickness range of the layer to be measured.
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申请公布号 |
US7187191(B2) |
申请公布日期 |
2007.03.06 |
申请号 |
US20030411596 |
申请日期 |
2003.04.10 |
申请人 |
BALLUFF GMBH |
发明人 |
JAGIELLA MANFRED;FERICEAN SORIN |
分类号 |
G01R31/26;G01B7/06;H01L21/66;H03K17/95 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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