发明名称 ENCLOSURE FOR GAS ELLIMINATOR
摘要 An enclosure for a gas eliminator is provided to control a water spray effect by inserting efficiently a box structure as a removal unit of a water spray prevention structure thereof. A gas eliminator includes a liquid injection nozzle(13) for generating liquid particles, a filter(15) for removing impurities, a plurality of fixing plates(17) having a plurality of bent parts, and an air passing channel box structure. A main body includes barrier ribs having lattice reception parts(101). The air passing channel box structure is inserted into the lattice reception part of the main body. A moisture-absorbing fiber plate(20) is attached to both sides of the air passing channel box structure.
申请公布号 KR100693916(B1) 申请公布日期 2007.03.06
申请号 KR20050092084 申请日期 2005.09.30
申请人 SHIN SUNG ENG CO., LTD. 发明人 NAM, SEUNG BAEG;PARK, GUEN WOO;KIM, TAE HYUNG;HA, JONG PIL
分类号 H01L21/02 主分类号 H01L21/02
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