发明名称 |
Mover device and semiconductor manufacturing apparatus and method |
摘要 |
A mover device and an ion implanter apparatus having a processing base that reciprocates at a high speed without undesirable noise and vibration are provided. The mover device includes: a fixed base; a movable base that is linearly movable with respect to the fixed base; a processing base that is linearly movable with respect to the movable base; a main linear motor that generates a moving force to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base; and a velocity control unit that controls the moving velocity of the processing base with respect to the fixed base. In this mover device, the movable base is moved by virtue of a reaction force caused by the moving force to move the processing base.
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申请公布号 |
US7187143(B2) |
申请公布日期 |
2007.03.06 |
申请号 |
US20040781756 |
申请日期 |
2004.02.20 |
申请人 |
SUMITOMO EATON NOVA, CORPORATION |
发明人 |
OKADA KEIJI;HIDAKA YOSHITOMO;SUGITANI MICHIRO;MURAKAMI JUNICHI;SATO FUMIAKI;TSUKIHARA MITSUKUNI;HIROKAWA SUGURU;SHINOZUKA MASAMITSU |
分类号 |
H01L21/68;H02P1/00;H01L21/677 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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