| 摘要 |
An electrical property evaluation apparatus for measuring an electrical property of an object includes a magnetic field generating mechanism that generates a magnetic field in a target area on the object, and a magnetic sensor for measuring the magnetic field near the target area. A cantilever having a conducting probe is supported so that the probe can be brought into contact with the target area. A bending measurement mechanism measures an amount of bending of the cantilever when the probe is brought into contact with the object. A control section controls a moving mechanism to maintain the bending amount of the cantilever constant. A voltage source applies a voltage to the probe, and an electrical property measuring section measures a current or an electrical resistance between the probe and the object in contact with each other.
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