发明名称 Complementary metal gate electrode technology
摘要 A method for making circuit device that includes a first transistor having a first metal gate electrode overlying a first gate dielectric on a first area of a semiconductor substrate. The first gate electrode has a work function corresponding to the work function of one of P-type silicon and N-type silicon. The circuit device also includes a second transistor coupled to the first transistor. The second transistor has a second metal gate electrode over a second gate dielectric on a second area of the semiconductor substrate. The second gate metal gate electrode has a work function corresponding to the work function of the other one of P-type silicon and N-type silicon.
申请公布号 US7187044(B2) 申请公布日期 2007.03.06
申请号 US20000517705 申请日期 2000.03.02
申请人 INTEL CORPORATION 发明人 LIANG CHUNLIN;BAI GANG
分类号 H01L29/76;H01L21/8238 主分类号 H01L29/76
代理机构 代理人
主权项
地址