发明名称 |
Method for acquiring information of a biochip using time of flight secondary ion mass spectrometry and an apparatus for acquiring information for the application thereof |
摘要 |
A measurement method is provided, which enables to obtain a two-dimensional image with better quantitative-ability by suppressing the influence of the charge-up, when the two-dimensional secondary ion image is obtained for a biological material fixed on a substrate having a high resistivity by utilizing a TOF-SIMS method in a certain wide area. A two-dimensional image having considerably high positioning resolution-ability can be obtained by the procedure in which the pulsed primary ion beam is irradiated at a spot, and the pulse-wise spot-applications of the primary ion beam and the simultaneous detection of the secondary ion generated from the irradiated primary ion beam proceed along with a discontinuous scanning pattern, and eventually the results of these secondary ion measurements are reconstructed into a two-dimensional image in line with the aforementioned discontinuous scanning pattern.
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申请公布号 |
US7188031(B1) |
申请公布日期 |
2007.03.06 |
申请号 |
US20030601777 |
申请日期 |
2003.06.24 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
OKAMOTO TADASHI;TAKASE HIROMITSU;HASHIMOTO HIROYUKI |
分类号 |
G01N33/48;C12M1/34;C12Q1/00;G01N23/02;G01N23/225;G01N27/62;G01N33/483;G01N33/53;G01N33/566;G01R23/02;H01J49/16;H01J49/40 |
主分类号 |
G01N33/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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