发明名称 Method and apparatus for fabricating mercuric iodide polycrystalline films for digital radiography
摘要 A method is provided for fabricating in a thermal evaporation system a polycrystalline film capable of directly detecting radiation. Source material is placed in a container, and the container is evacuated to create a vacuum within the container. The source material is heated to evaporate the source material for depositing on a substrate. The polycrystalline film is used in as deposited form to detect the radiation.
申请公布号 US7186985(B2) 申请公布日期 2007.03.06
申请号 US20020158494 申请日期 2002.05.30
申请人 DXRAY, INC. 发明人 IWANCZYK JAN S.;PATT BRADLEY E.
分类号 G01T1/00;G01T1/24;C23C14/06;C23C14/24;C23C14/56;G01T1/20;H01L27/146;H01L31/115;H04N5/32 主分类号 G01T1/00
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