发明名称 |
Method and apparatus for fabricating mercuric iodide polycrystalline films for digital radiography |
摘要 |
A method is provided for fabricating in a thermal evaporation system a polycrystalline film capable of directly detecting radiation. Source material is placed in a container, and the container is evacuated to create a vacuum within the container. The source material is heated to evaporate the source material for depositing on a substrate. The polycrystalline film is used in as deposited form to detect the radiation.
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申请公布号 |
US7186985(B2) |
申请公布日期 |
2007.03.06 |
申请号 |
US20020158494 |
申请日期 |
2002.05.30 |
申请人 |
DXRAY, INC. |
发明人 |
IWANCZYK JAN S.;PATT BRADLEY E. |
分类号 |
G01T1/00;G01T1/24;C23C14/06;C23C14/24;C23C14/56;G01T1/20;H01L27/146;H01L31/115;H04N5/32 |
主分类号 |
G01T1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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