| 摘要 |
Semiconductor diffusion equipment having a cooling unit is provided to rapidly replace a tube by a preventive maintenance process by rapidly cooling down a tube having undergone a high-temperature heat treatment to a predetermined cooling temperature. A first cooling unit(300) is disposed to cool down a tube(100). A second cooling unit(400) is mounted on the first cooling unit, surrounding a part of the first cooling unit. The first cooling unit consists of a first coolant supply part(310), an introduction part and a first cooling line(320). The introduction part is connected to the first coolant supply part and the tube wherein coolant is introduced into the tube through the introduction part. The first cooling line is equipped with an exhaust part through which the coolant from the tube is exhausted.
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