Insulating target material, method of manufacturing insulating target material, insulating complex oxide film, and device

摘要

An insulating target material for obtaining an insulating complex oxide film represented by a general formula AB_1-XC_XO₃, an element A including at least Pb, an element B including at least one of Zr, Ti, V, W, and Hf, and an element C including at least one of Nb and Ta.