发明名称 Methods and apparatus for symmetrical and/or concentric radio frequency matching networks
摘要 Apparatus and methods are provided that are adapted to match the impedance of an electrical load to an impedance of an electrical signal generator. The invention includes providing a plurality of electrical components adapted to collectively match the impedance of the electrical load to the impedance of the electrical signal generator. The electrical components are arranged symmetrically and concentrically about an axis. Additionally, the invention may also include a first connector adapted to electrically couple the electrical signal generator to the electrical components. Additionally, the invention may also include a second connector adapted to electrically couple the load to the electrical components. Numerous other aspects are provided.
申请公布号 US2007046391(A1) 申请公布日期 2007.03.01
申请号 US20060507649 申请日期 2006.08.21
申请人 APPLIED MATERIALS, INC. 发明人 SORENSEN CARL;WHITE JOHN M.
分类号 H03H7/38 主分类号 H03H7/38
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