发明名称 SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING SUCH SEMICONDUCTOR DEVICE AND SUBSTRATE FOR SUCH SEMICONDUCTOR DEVICE
摘要 Provided is a semiconductor device wherein bonding strength between a semiconductor chip and a substrate is sufficiently improved and generation of cracks due to thermal shock, temperature cycle and the like is surely prevented. The semiconductor device is provided with the semiconductor chip, and a substrate having a bonding region wherein the semiconductor chip is bonded through a metal layer. The metal layer is provided with a Au-Sn-Ni alloy layer and a solder layer over the Au-Sn-Ni alloy layer. An interface between the Au-Sn-Ni alloy layer and the solder layer has irregularity.
申请公布号 WO2007023743(A1) 申请公布日期 2007.03.01
申请号 WO2006JP316240 申请日期 2006.08.18
申请人 ROHM CO., LTD.;HAGA, MOTOHARU;KASUYA, YASUMASA;MATSUBARA, HIROAKI 发明人 HAGA, MOTOHARU;KASUYA, YASUMASA;MATSUBARA, HIROAKI
分类号 H01L21/52 主分类号 H01L21/52
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