Depositing method for depositing absorber layers for thin-layer solar cells covers layer-forming elements in a vapor phase while depositing them on a substrate

摘要

All layer-forming elements are cover-vapored in a vacuum working chamber (1), mixed in a vapor phase (11) and deposited on a substrate (3). During the vaporizing process, a plasma (13) is ignited and maintained in a space between a vaporizer's sources (9) and the substrate. An independent claim is also included for a device for depositing absorber layers for thin-layer solar cells.