METHOD FOR MANUFACTURING POLYCRYSTALLINE SILICONE THIN FILM AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR USING SAME

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a polycrystalline silicone thin film having enhanced electrical properties, and to provide a method for manufacturing a thin film transistor having the same. SOLUTION: The method includes: a step to form an amorphos silicone thin film on a substrate; a step to partially melt the amorphos silicone thin film by irradiating a part of the amorphos silicone thin film with a laser beam having low energy density; a step to form a polycrystalline silicone grain having a unidirectional crystal arrangement by crystallizing the partially melted amorphos silicone thin film; a step to completely melt the amorphos silicone thin film by being irradiated with a laser beam having high energy density repetitively while moving at predetermined intervals from the polycrystalline silicone grain; and a step to grow the polycrystalline silicone grain by crystallizing the completely melted amorphos silicon thin film so that it may correspond with the unidirectional crystal arragnement. COPYRIGHT: (C)2007,JPO&INPIT