摘要 |
PROBLEM TO BE SOLVED: To prevent an electrical cross talk out of an actuator from getting into the detection signal of a pressure sensor. SOLUTION: As a member constituting a partition wall of a pressure chamber which generates pressure for discharging liquid droplets, a droplet discharging head has a first diaphragm wherein a piezoelectric element as a pressure generating means is formed on the outside of the pressure chamber, and a second diaphragm which is disposed opposite to the first diaphragm and wherein a pressure detecting element is formed on the outside of the pressure chamber. When laminating a pressure chamber unit wherein a nozzle plate having a nozzle for discharging droplets formed is formed substantially orthogonal to the first and second diaphragms and which has the pressure chambers therein, a plurality of the mutual first and the second diaphragms of the mutual pressure chambers which are adjacent in the laminating direction are disposed so as to be opposed with each other and are laminated to compose the droplet discharging head. COPYRIGHT: (C)2007,JPO&INPIT
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