Nonlinear internal resonance based micromechanical resonators

摘要

A micromechanical resonator having a structure defining a first mode and a second mode and permitting non-linear internal resonance between the first and second modes. The resonator may further include a first component embodying a first mode and a second component embodying a second mode such that the first and second modes are substantially completely non-linearly coupled with each other while the second component vibrates at a frequency approximately twice the at least one first natural resonance frequency.