发明名称 |
METHOD OF MAKING GRAYSCALE MASK FOR GRAYSCALE DOE PRODUCTION BY USING AN ABSORBER LAYER |
摘要 |
The present invention relates to manufacturing grayscale masks that are used for mass-producing grayscale DOEs. More specifically, the present invention provides a method whereby a grayscale mask is fabricated by using an absorber layer and a photoresist with a laser writer. The method of the present invention includes the steps of providing a substrate with a known layer of absorber and a layer of photoresist, exposing the photoresist to a grayscale pattern from a laser writer, developing the photoresist into variable thickness, and transferring the surface relief pattern from the photoresist layer onto the absorber layer by etching. |
申请公布号 |
WO2006011977(A3) |
申请公布日期 |
2007.03.01 |
申请号 |
WO2005US20723 |
申请日期 |
2005.06.14 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD;LIU, XINBING |
发明人 |
LIU, XINBING |
分类号 |
G03F1/00;G03C5/00;G03F1/14 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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