发明名称 METHOD AND DEVICE FOR THE PERMANENT CONNECTION OF INTEGRATED CIRCUIT TO A SUBSTRATE
摘要 The invention relates to a method and a device for permanently connecting integrated circuits (1) to at least one substrate (2) located therebelow by means of an adhesive (3) which is disposed therebetween and on the edges relative to the integrated circuits (1). In order to cure the adhesive (3), light (19) having a wavelength ranging between 280 and 900 nm is radiated onto the top or/and bottom face of the assembly comprising the substrate (2) and one of the integrated circuits (1) so as to polymerize the adhesive (3).
申请公布号 WO2006136603(B1) 申请公布日期 2007.03.01
申请号 WO2006EP63469 申请日期 2006.06.22
申请人 MUEHLBAUER AG;AUGST, UWE 发明人 AUGST, UWE
分类号 H01L21/58;H01L21/56;H01L21/60 主分类号 H01L21/58
代理机构 代理人
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