摘要 |
[0261] A method of operating a wavefront interferometry system that generates an array of interference signals that contains information about relative wavefronts of measurement and reference beams, the method involving: from the array of interference signals, computing a first array of phase measurements for a first time and a second array of phase measurements for a second time; computing a difference of the first and second arrays of phase measurements to determine an array of rates of phase changes; and from the array of rates of phase changes, computing an array of atmospheric turbulence effect values which is a measure of atmospheric turbulence effects in the wavefront interferometry system. |