发明名称 CLEANING METHODS FOR SILICON ELECTRODE ASSEMBLY SURFACE CONTAMINATION REMOVAL
摘要 Silicon electrode assembly decontamination cleaning methods and solutions, which control or eliminate possible chemical attacks of electrode assembly bonding materials, comprise ammonium fluoride, hydrogen peroxide, acetic acid, optionally ammonium acetate, and deionized water.
申请公布号 WO2006071552(A3) 申请公布日期 2007.03.01
申请号 WO2005US45460 申请日期 2005.12.15
申请人 LAM RESEARCH CORPORATION;REN, DAXING;SHIH, HONG 发明人 REN, DAXING;SHIH, HONG
分类号 H01L21/302;C23G1/02 主分类号 H01L21/302
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