FLUORIDE LIQUID CLEANERS WITH POLAR AND NON-POLAR SOLVENT MIXTURES FOR CLEANING LOW-K-CONTAINING MICROELECTRONIC DEVICES
摘要
A liquid removal composition and process for removing post-ash residue, post-etch residue and/or bottom anti-reflective coating (BARC) residue from a microelectronic device having said residue thereon. The liquid removal composition includes a fluoride source and an amphiphilic solvent. The composition achieves high-efficiency removal of the residue material from the microelectronic device without damaging metal species or low-k dielectric materials employed in the microelectronic device architecture.
申请公布号
WO2006110645(A3)
申请公布日期
2007.03.01
申请号
WO2006US13306
申请日期
2006.04.10
申请人
ADVANCED TECHNOLOGY MATERIALS, INC.;MINSEK, DAVID W.;BERNHARD, DAVID D.;BAUM, THOMAS H.
发明人
MINSEK, DAVID W.;BERNHARD, DAVID D.;BAUM, THOMAS H.