发明名称 MANUFACTURING METHOD OF AMOLED PANEL
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of an active matrix type organic light emitting diode (AMOLED) panel in order to solve various problems associated with conventional technology. SOLUTION: The method of the invention includes the steps of; forming at least one data line and at least one drain metal on a substrate; forming a buffer insulating layer on the substrate; forming at least one active layer on the buffer insulating layer; forming a gate insulating layer on the active layer and on the buffer insulating layer; forming a gate metal on the gate insulating layer above the active layer; forming a source and a drain in a corresponding side of the gate metal by doping ion to the active layer using the gate metal as a mask for self alignment; forming a plurality of via-holes on the gate insulating layer; forming a plurality of transparent electrodes in each via-hole and the gate insulating layer; and forming a light emitting diode in the transparent electrode after exposing the transparent electrode by forming a pixel specified layer. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007052390(A) 申请公布日期 2007.03.01
申请号 JP20050316337 申请日期 2005.10.31
申请人 CHUNGHWA PICTURE TUBES LTD 发明人 CHEN CHEN-MING
分类号 G09F9/30;H01L21/3205;H01L21/336;H01L23/52;H01L27/32;H01L29/786;H01L51/50;H05B33/10 主分类号 G09F9/30
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