| 摘要 |
PROBLEM TO BE SOLVED: To provide a container for heater ensuring excellent soaking properties of a heater and excellent durability by preventing the effect of heat when the heater is heated, and suitably used as a coater developer employed especially in photolithography process. SOLUTION: The container 1 for containing and supporting a heater 2 for heating a semiconductor has at least one through-hole 3 in the backside or the side face on the side opposite to an opening for installing the heater 2 wherein the diameter of the through-hole 3 is smaller than the height of the container 1. Assuming the shortest distance between the through-holes 3 is A(mm) and the plate thickness of the container 1 is B(mm), following relation is preferably satisfied; A×B≥1.0. When the container 1 is installed on a supporting stand 4, an air gap is preferably provided between the container 1 and the supporting stand 4 by means of a container supporting leg 5. COPYRIGHT: (C)2007,JPO&INPIT
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