| 摘要 |
PROBLEM TO BE SOLVED: To precisely control the discharge quantity of a drug solution when discharging the drug solution based on the capacity change of a pump chamber followed by the action of the variable capacity member such as a bellows, etc. SOLUTION: A chemical supply pump 10 comprises the bellows 15 stored in a pump housing 11. The pump chamber 13 and a pressure applying chamber 14 are demarcated by the bellows 15. The pressure applying chamber 14 is connected to an electropneumatic regulator 28. The chemical supply pump 10 sucks or discharges the drug solution based on the capacity change of the pump chamber 13 followed by the displacement of the bellows 15. Before the opening of a discharge valve 25, the controller 40 operates the operation air pressure by the electropneumatic regulator 28 so as to make the pump inside pressure be the same as the discharge side pressure, thereby regulating the pump inside pressure. COPYRIGHT: (C)2007,JPO&INPIT
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