| 摘要 |
PROBLEM TO BE SOLVED: To provide a cerium oxide powder, a method for producing the same, and a dispersion liquid containing the powder. SOLUTION: The cerium oxide powder has a BET surface area of 25-150 m<SP>2</SP>/g and contains primary particles having an average diameter of 5-50 nm. The layer close to the surface of each primary particle has a depth of about 5 nm, and the carbonate concentration in the layer close to the surface is decreased toward inside from the surface. The content of carbon deriving from carbonate groups is 5-50% by area percentage on the surface and 0-30% by area percentage at a depth of about 5 nm in the layer close to the surface. The content of cerium oxide is at least 99.5 mass% based on powder. Further, the content of carbon is 0.01-0.3 mass% based on powder. The dispersion liquid is sufficiently stable even when an additive is not added additionally and can be used for chemical and mechanical polishing within a range from neutrality to weak alkalinity. COPYRIGHT: (C)2007,JPO&INPIT
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