发明名称 |
METHOD FOR CONTINUOUSLY BLENDING CHEMICAL SOLUTIONS |
摘要 |
Provided are a method and apparatus for continuously blending a chemical solution for use in semiconductor processing. The method involves the step of mixing a first chemical stream with a second chemical stream in a controlled manner to form a stream of a solution having a predetermined formulation. The apparatus allows one to practice the above method. The method and apparatus can accurately provide chemical solutions of desired concentration in a continuous manner. The invention has particular applicability in semiconductor device fabrication.
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申请公布号 |
US2007047381(A1) |
申请公布日期 |
2007.03.01 |
申请号 |
US20060551739 |
申请日期 |
2006.10.23 |
申请人 |
AIR LIQUIDE AMERICA CORPORATION |
发明人 |
URQUHART KARL J.;THOMPSON JOHN B.;HOFFMAN JOE G. |
分类号 |
B01F15/04;H01L21/306 |
主分类号 |
B01F15/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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