发明名称 |
Laser induced plasma machining with a process gas |
摘要 |
Embodiments of methods of laser machining that include inducing formation of a plasma plume from a process gas through interaction of the gas with a laser beam are disclosed. The methods may include removing material from the substrate by interaction of the induced plasma plume with the substrate.
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申请公布号 |
US2007045252(A1) |
申请公布日期 |
2007.03.01 |
申请号 |
US20050210289 |
申请日期 |
2005.08.23 |
申请人 |
KLEINE KLAUS;PALLEY SCOTT;KORTE FRANK |
发明人 |
KLEINE KLAUS;PALLEY SCOTT;KORTE FRANK |
分类号 |
B23K26/00;B23K10/00 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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