SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND METHOD FOR MANUFACTURING SAME

摘要

A semiconductor integrated circuit device (10) which has a layered structure is composed of a plurality of semiconductor layers (L1, L2, L3) in which an integrated circuit is formed on a substrate. Each of the semiconductor layers (L1, L2, L3) has a semiconductor integrated circuit portion (16) that includes the abovementioned integrated circuit on a substrate (11). Each of the semiconductor layers (L1, L2, L3) also has on a substrate at least one unit of through-wiring (17a) for electrically connecting the integrated circuit included in the semiconductor integrated circuit portion (16) to an integrated circuit of another semiconductor layer, and a surrounding insulation portion (18) for surrounding and insulating the through-wiring from the semiconductor integrated circuit portion. A structure formed by the surrounding insulation portion (18) and the through-wiring portion (17) composed of a plurality of units of through-wiring (17a) reduces the resistance of the through-wiring portion and increases the degree of integration of a circuit.